Experimental determination of the eective mobility in NMOSFETs: a comparative study
نویسندگان
چکیده
We present a comparison between the dierent methods reported in the literature to experimentally determine the electron mobility in the channel of a MOSFET. In order to accurately obtain the mobility for use in an I±V model a suitable determination of inversion charge and electric potential is shown to be relevant. Numerical simulation is demonstrated to be a powerful tool to carry out mobility extraction, particularly in the moderate-inversion region, and to accurately calculate the eective electric ®eld. # 1999 Elsevier Science Ltd. All rights reserved.
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